Reduced-order modelling of the bending of an array of torsional micromirrors

被引：0

作者：

A. Molfese

A. Nannini

F. Pieri

机构：

[1] C.N.R. - Sezione di Pisa,IEIIT

[2] Università di Pisa,Dipartimento di Ingegneria dell’Informazione

来源：

Analog Integrated Circuits and Signal Processing | 2007年 / 53卷

关键词：

Micromirrors; MEMS modelling; FEM simulation;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteristics of the micromirrors by taking into account the flexural deformation of the structure is presented. The results are compared with 3D coupled-field FEM simulation.

引用

页码：137 / 143

页数：6