Reduced-order modelling of the bending of an array of torsional micromirrors

被引：0
作者：
A. Molfese
A. Nannini
F. Pieri
机构：
[1] C.N.R. - Sezione di Pisa,IEIIT
[2] Università di Pisa,Dipartimento di Ingegneria dell’Informazione
来源：
Analog Integrated Circuits and Signal Processing | 2007年 / 53卷
关键词：
Micromirrors; MEMS modelling; FEM simulation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteristics of the micromirrors by taking into account the flexural deformation of the structure is presented. The results are compared with 3D coupled-field FEM simulation.
引用
收藏
页码：137 / 143
页数：6
相关论文
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