Spectral investigations of a nonstationary high-frequency discharge in carbon tetrafluoride and sulfur hexafluoride

被引：3

作者：

Abramov A.V. ^{[1
]}

Abramova E.A. ^{[2
]}

Dikarev Y.I. ^{[1
]}

Surovtsev I.S. ^{[2
]}

机构：

[1] Voronezh State University, 1 Universitetskaya Sq., Voronezh, 394693, Russia

[2] Voronezh State Arch.-Civ. Eng. Univ., Voronezh, Russia

来源：

Journal of Applied Spectroscopy | 2004年 / 71卷 / 5期

关键词：

atomic fluorine; gas-discharge plasma; high-frequency glow discharge; spectral actinometry;

D O I：

10.1023/B:JAPS.0000049634.82967.88

中图分类号：

学科分类号：

摘要：

The possibility of using a single-channel spectral computer complex for studying, by an actinometry method, the laws governing a change in the concentration of atomic fluorine in the nonstationary period of a high-frequency discharge in SF 6 and CF 4 gases is shown. It has been established that the dependence of the atomic fluorine concentration on the time of discharge running is influenced by the state of the discharge chamber surface and, first of all, the degree of its hydration. In particular, this dependence can be monotonic or have a maximum that owes its origin to the sedimentation of the products of the dissociation of molecules on the surfaces of the discharge chamber walls contacting a plasma.

引用

页码：715 / 720

页数：5

共 11 条

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