Structural and mechanical properties of magnetron-sputtered Al–Au thin films

被引：0
作者：
Jalal Azadmanjiri
James Wang
Christopher C. Berndt
Cuie Wen
Vijay K. Srivastava
Ajay Kapoor
机构：
[1] Swinburne University of Technology,Faculty of Science, Engineering and Technology
[2] Stony Brook University,Department of Materials Science and Engineering
[3] RMIT University,School of Aerospace, Mechanical and Manufacturing Engineering
[4] Indian Institute of Technology,Department of Mechanical Engineering
[5] BHU,undefined
[6] Varanasi,undefined
来源：
Applied Physics A | 2017年 / 123卷
关键词：
Elastic Modulus; Composite Thin Film; Kirkendall Void; Thin Film Thickness; Total Film Thickness;
D O I：
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摘要：
There is global interest in improving the mechanical properties of light metals such as aluminum (Al)-based alloys by tailoring their microstructures at the nanometer scale. On the other hand, gold (Au) has been widely applied as a wire bonding material due to its prominent ductility and conductivity. In this study, the microstructure, hardness and elastic modulus of DC magnetron-sputtered aluminum/gold (Al/Au) composite thin films of different thicknesses were investigated. It is shown that in addition to the formation of AlAu2 phase, additional Al and Au nanosegregated phases also formed. The Al/Au thin films of 600 and 800 nm thickness exhibit the maximum hardness (~5.40 GPa) and elastic modulus (~97.00 GPa). However, film thicknesses of 1000 and 1200 nm demonstrate a reduction in hardness and elastic modulus due to different growth mechanisms and the formation of voids that can be attributed to the Kirkendall phenomenon.
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  • [11] Jasinski JB(2015)undefined RSC Adv. 5 32744-undefined
  • [12] Sunkara MK(2010)undefined Cryst. Growth Des. 10 1319-undefined
  • [13] Panciera F(2015)undefined Nat. Commun. 6 6957-undefined
  • [14] Chou YC(2013)undefined RSC Adv. 3 3707-undefined
  • [15] Reuter MC(2012)undefined New J. Chem. 36 2112-undefined
  • [16] Zakharov D(2005)undefined J. Phys. Chem. B 109 14445-undefined
  • [17] Stach EA(2013)undefined Adv. Mater. 25 2707-undefined
  • [18] Hofmann S(2009)undefined J. Chin. Chem. Soc. 56 89-undefined
  • [19] Ross FM(2008)undefined Appl. Surf. Sci. 254 6289-undefined
  • [20] Hojati-Talemi P(2008)undefined Langmuir 24 7648-undefined
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