Microstructure and mechanical properties of hafnium carbide coatings synthesized by reactive magnetron sputtering

被引:0
作者
Guanqun Li
Geyang Li
机构
[1] Shanghai Jiao Tong University,State Key Laboratory of Metal Matrix Composites
来源
Journal of Coatings Technology and Research | 2010年 / 7卷
关键词
Hafnium carbide; Hard coatings; Microstructure; Mechanical properties; Magnetron sputtering;
D O I
暂无
中图分类号
学科分类号
摘要
Hafnium carbide coatings with different carbon contents were synthesized in Ar–C2H2 mixture by reactive magnetron sputtering. Energy-dispersive X-ray, X-ray diffraction, scanning electron microscopy, atomic force microscopy, and nanoindentation were employed to characterize their microstructure and mechanical properties. The effects of C2H2 partial pressure on the composition, phase, microstructure, and mechanical properties of the coatings were investigated. The results show that hafnium carbide coatings can be synthesized at a low partial pressure of C2H2. The single-phase HfC coating with columnar crystal and favorable mechanical properties is obtained when the proportion of C2H2 partial pressure is only about 3.0% in the mixture, and the highest hardness and modulus are 27.9 and 255 GPa, respectively. The coating contains metal Hf and HfC phases and obtains low hardness under lower C2H2 partial pressure. When the C2H2 partial pressure is higher, the hardness and elastic moduli of acquired amorphous coatings decrease significantly.
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页码:403 / 407
页数:4
相关论文
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