High-speed vacuum evaporation of large-area targets by a focused electron beam

被引：0

作者：

A. P. Semenov

I. A. Semenova

机构：

[1] Russian Academy of Sciences,Institute of Physical Materials Science, Siberian Branch

来源：

Instruments and Experimental Techniques | 2017年 / 60卷

关键词：

D O I：

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中图分类号：

学科分类号：

摘要：

A method of electron-beam evaporation of a target in a vacuum of ~10–2 Pa is considered. Initially, a focused electron beam spot moves at the periphery of the target in a circular path with an angular velocity of 8–80 rad/s by means of a ring sweep in the frequency range of 50–500 Hz. Then, by radial displacement with a linear velocity of 10–100 mm/s, the spot is guided over a spiral path from the edge of the target to its center. Due to spiral scanning, the spot runs across the entire target surface with a much larger area in 0.1–1.0 s and rapidly vaporizes the target.

引用

页码：450 / 452

页数：2

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