Van der Waals integration of high-κ perovskite oxides and two-dimensional semiconductors

被引:0
作者
Allen Jian Yang
Kun Han
Ke Huang
Chen Ye
Wen Wen
Ruixue Zhu
Rui Zhu
Jun Xu
Ting Yu
Peng Gao
Qihua Xiong
X. Renshaw Wang
机构
[1] Nanyang Technological University,Division of Physics and Applied Physics, School of Physical and Mathematical Sciences
[2] Peking University,International Center for Quantum Materials, School of Physics
[3] Peking University,Electron Microscopy Laboratory, School of Physics
[4] Tsinghua University,State Key Laboratory of Low
[5] Beijing Academy of Quantum Information Sciences,Dimensional Quantum Physics and Department of Physics
[6] Nanyang Technological University,School of Electrical and Electronic Engineering
来源
Nature Electronics | 2022年 / 5卷
关键词
D O I
暂无
中图分类号
学科分类号
摘要
Two-dimensional semiconductors can be used to build next-generation electronic devices with ultrascaled channel lengths. However, semiconductors need to be integrated with high-quality dielectrics—which are challenging to deposit. Here we show that single-crystal strontium titanate—a high-κ perovskite oxide—can be integrated with two-dimensional semiconductors using van der Waals forces. Strontium titanate thin films are grown on a sacrificial layer, lifted off and then transferred onto molybdenum disulfide and tungsten diselenide to make n-type and p-type transistors, respectively. The molybdenum disulfide transistors exhibit an on/off current ratio of 108 at a supply voltage of 1 V and a minimum subthreshold swing of 66 mV dec−1. We also show that the devices can be used to create low-power complementary metal–oxide–semiconductor inverter circuits.
引用
收藏
页码:233 / 240
页数:7
相关论文
共 50 条
  • [31] Scalable integration of hybrid high-κ dielectric materials on two-dimensional semiconductors
    Xu, Yongshan
    Liu, Teng
    Liu, Kailang
    Zhao, Yinghe
    Liu, Lei
    Li, Penghui
    Nie, Anmin
    Liu, Lixin
    Yu, Jun
    Feng, Xin
    Zhuge, Fuwei
    Li, Huiqiao
    Wang, Xinran
    Zhai, Tianyou
    NATURE MATERIALS, 2023, 22 (09) : 1078 - 1084
  • [32] Highly reproducible van der Waals integration of two-dimensional electronics on the wafer scale
    Yang, Xiangdong
    Li, Jia
    Song, Rong
    Zhao, Bei
    Tang, Jingmei
    Kong, Lingan
    Huang, Hao
    Zhang, Zhengwei
    Liao, Lei
    Liu, Yuan
    Duan, Xiangfeng
    Duan, Xidong
    NATURE NANOTECHNOLOGY, 2023, 18 (05) : 471 - +
  • [33] Highly reproducible van der Waals integration of two-dimensional electronics on the wafer scale
    Xiangdong Yang
    Jia Li
    Rong Song
    Bei Zhao
    Jingmei Tang
    Lingan Kong
    Hao Huang
    Zhengwei Zhang
    Lei Liao
    Yuan Liu
    Xiangfeng Duan
    Xidong Duan
    Nature Nanotechnology, 2023, 18 : 471 - 478
  • [34] Scalable integration of hybrid high-κ dielectric materials on two-dimensional semiconductors
    Yongshan Xu
    Teng Liu
    Kailang Liu
    Yinghe Zhao
    Lei Liu
    Penghui Li
    Anmin Nie
    Lixin Liu
    Jun Yu
    Xin Feng
    Fuwei Zhuge
    Huiqiao Li
    Xinran Wang
    Tianyou Zhai
    Nature Materials, 2023, 22 : 1078 - 1084
  • [35] Two-dimensional capillaries assembled by van der Waals heterostructures
    Ma, Jiaojiao
    Guan, Kaiwen
    Jiang, Yu
    Cao, Yang
    Hu, Sheng
    NANO RESEARCH, 2023, 16 (03) : 4119 - 4129
  • [36] Recent advances in two-dimensional van der Waals magnets
    Xu, Hang
    Xu, Shengjie
    Xu, Xun
    Zhuang, Jincheng
    Hao, Weichang
    Du, Yi
    MICROSTRUCTURES, 2022, 2 (02):
  • [37] The Magnetic Genome of Two-Dimensional van der Waals Materials
    Wang, Qing Hua
    Bedoya-Pinto, Amilcar
    Blei, Mark
    Dismukes, Avalon H.
    Hamo, Assaf
    Jenkins, Sarah
    Koperski, Maciej
    Liu, Yu
    Sun, Qi-Chao
    Telford, Evan J.
    Kim, Hyun Ho
    Augustin, Mathias
    Vool, Uri
    Yin, Jia-Xin
    Li, Lu Hua
    Falin, Alexey
    Dean, Cory R.
    Casanova, Felix
    Evans, Richard F. L.
    Chshiev, Mairbek
    Mishchenko, Artem
    Petrovic, Cedomir
    He, Rui
    Zhao, Liuyan
    Tsen, Adam W.
    Gerardot, Brian D.
    Brotons-Gisbert, Mauro
    Guguchia, Zurab
    Roy, Xavier
    Tongay, Sefaattin
    Wang, Ziwei
    Hasan, M. Zahid
    Wrachtrup, Joerg
    Yacoby, Amir
    Fert, Albert
    Parkin, Stuart
    Novoselov, Kostya S.
    Dai, Pengcheng
    Balicas, Luis
    Santos, Elton J. G.
    ACS NANO, 2022, 16 (05) : 6960 - 7079
  • [38] Two-Dimensional Van Der Waals Thin Film and Device
    Liao, Liping
    Kovalska, Evgeniya
    Regner, Jakub
    Song, Qunliang
    Sofer, Zdenek
    SMALL, 2024, 20 (04)
  • [39] Stacking ferroelectricity in two-dimensional van der Waals materials
    Gui, Zhigang
    Huang, Li
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2025, 37 (11)
  • [40] Two-Dimensional van der Waals Nanoplatelets with Robust Ferromagnetism
    De Siena, Michael C.
    Creutz, Sidney E.
    Regan, Annie
    Malinowski, Paul
    Jiang, Qianni
    Kluherz, Kyle T.
    Zhu, Guomin
    Lin, Zhong
    De Yoreo, James J.
    Xu, Xiaodong
    Chu, Jiun-Haw
    Gamelin, Daniel R.
    NANO LETTERS, 2020, 20 (03) : 2100 - 2106