Cycle time analysis for wafer revisiting process in scheduling of single-arm cluster tools

被引：10

作者：

Sun Y.-X. ^{[1
]}

Wu N.-Q. ^{[1
]}

机构：

[1] School of Mechatronics Engineering, Guangdong University of Technology

来源：

International Journal of Automation and Computing | 2011年 / 8卷 / 4期

基金：

中国国家自然科学基金;

关键词：

automated manufacturing systems; cluster tools; Petri net; Scheduling; semiconductor manufacturing;

D O I：

10.1007/s11633-011-0601-5

中图分类号：

学科分类号：

摘要：

Some wafer fabrication processes performed by cluster tools require revisiting. With wafer revisiting, a cluster tool is very difficult to be scheduled due to a large number of possible schedules for the revisiting process. Atomic layer deposition (ALD) is a typical process with wafer revisiting that should be performed by cluster tools. This paper discusses the scheduling problem of single-arm cluster tools for the ALD process. In scheduling such a system, the most difficult part is to schedule the revisiting process such that the cycle time is minimized. Thus, this paper studies the revisiting process of ALD with revisiting times k = 3, 4, and 5, and analytical expressions are obtained to calculate the cycle time for the k possible schedules. Then, the schedule with the minimal cycle time is the optimal one. In this way, the scheduling problem of such a revisiting process becomes very simple and this is a significant improvement in scheduling cluster tools with wafer revisiting. Illustrative example is presented to show the application of the proposed method. © 2011 Institute of Automation, Chinese Academy of Sciences and Springer-Verlag Berlin Heidelberg.

引用

页码：437 / 444

页数：7

共 13 条

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