Electroplating a magnetic core for micro fluxgate sensor

被引：0
作者：
Chun-Lei Kang
Gang Liu
Jian-Zhong Yang
Long-Hua Liu
Ying Xiong
Yang-Chao Tian
机构：
[1] University of Science and Technology of China,National Synchrotron Radiation Laboratory
[2] Tsinghua University,Department of Precision Instruments and Mechanology
来源：
Microsystem Technologies | 2009年 / 15卷
关键词：
Coercive Force; Saccharine; Magnetic Core; Magnetic Film; High Saturation Magnetization;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A square-ring shaped micro fluxgate sensor, which was designed for measuring two axes weak magnetic field at the same time, was fabricated using MEMS technologies. To get better magnetic properties, Ni/Fe permalloy was selected to be the materials of magnetic core which was fabricated by DC-electroplating method with several micron thickness. Saccharine was added into the electrolyte to reduce the internal stress, and its influence on magnetic properties was studied. The results show that magnetic properties are related to the crystalline phase transition in the deposition which varied with saccharine content. With 3 g/L saccharine in the electrolyte, a film with low coercive force and high saturation magnetization relatively was obtained and some characters of the sensor were also discussed in the paper.
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页码：413 / 419
页数：6
相关论文
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