ANKA – a synchrotron light source for X-ray based micromachining

被引：0
|
作者：
J. Göttert
H. O. Moser
F. J. Pantenburg
V. Saile
R. Steininger
机构：
[1] Forschungszentrum Karlsruhe,
[2] ANKA Project Group (PEA),undefined
[3] P.O. Box 3640,undefined
[4] D-76021 Karlsruhe,undefined
[5] Germany,undefined
[6] Forschungszentrum Karlsruhe,undefined
[7] Institute for Microstructure Technology (IMT),undefined
[8] P.O. Box 3640,undefined
[9] D-76021 Karlsruhe,undefined
[10] Germany,undefined
来源：
Microsystem Technologies | 2000年 / 6卷
关键词：
Radiation; Light Source; Synchrotron Radiation; Storage Ring; Related Service;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
 ANKA (Angströmquelle Karlsruhe) is a state-of-the-art synchrotron radiation facility currently under construction at the Forschungszentrum Karlsruhe. Based on a 2.5 GeV electron storage ring it delivers photons from the infrared through to the hard X-rays. Operation of ANKA is scheduled for September 2000. Synchrotron radiation related services in the fields of microfabrication and analytical services will be available from ANKA GmbH to industrial clients and scientific users.
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页码：113 / 116
页数：3
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