Metallic impurities in germanium tetrafluoride and germanium dioxide prepared from it

The composition and contents of metallic impurities (in nonvolatile form) in isotopically unmodified and 76Ge-depleted germanium tetrafluoride samples were determined by chemical atomic emission spectrometry. The germanium tetrafluoride samples were then converted to germanium dioxide. The impurity compositions of the resultant germanium dioxide samples were determined by laser mass spectrometry, atomic emission spectrometry, inductively coupled plasma mass spectrometry, and spark source mass spectrometry.