Stand for Experimentally Studying Local Parameters of Chemically Active Induction Discharge Plasma

被引：0

作者：

S. V. Sintsov

E. I. Preobrazhensky

R. A. Kornev

A. V. Vodopyanov

D. A. Mansfeld

机构：

[1] Institute of Applied Physics,

[2] Russian Academy of Sciences,undefined

[3] Lobachevsky National Research Nizhny Novgorod State University,undefined

[4] Institute of Chemistry of High-Purity Substances of the Russian Academy of Sciences,undefined

来源：

Instruments and Experimental Techniques | 2022年 / 65卷

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摘要：

引用

页码：419 / 425

页数：6

共 76 条

[1]

Shabarova L.V.(2019)undefined High Energy Chem. 53 482-undefined

[2]

Sennikov P.G.(2011)undefined Rev. Sci. Instrum. 82 063503-undefined

[3]

Kornev R.A.(2017)undefined Plasma Chem. Plasma Process. 37 997-undefined

[4]

Plekhovich A.D.(2019)undefined High Energy Chem. 53 246-undefined

[5]

Kutyin A.M.(2017)undefined Plasma Chem. Plasma Process. 37 1655-undefined

[6]

Vodopyanov A.V.(2011)undefined J. Phys. D: Appl. Phys. 44 233001-undefined

[7]

Golubev S.V.(2019)undefined Adv. Phys.: X 4 1592707-undefined

[8]

Mansfeld D.A.(2010)undefined J. Phys. D: Appl. Phys. 43 015202-undefined

[9]

Sennikov P.G.(2019)undefined AIP Adv. 9 1-undefined

[10]

Drozdov Yu.N.(2020)undefined J. Phys. D: Appl. Phys. 53 1-undefined