Synthesis and characterization of Cr–B–N coatings deposited by reactive arc evaporation

被引：0
作者：
K. Polychronopoulou
J. Neidhardt
C. Rebholz
M.A. Baker
M. O’Sullivan
A.E. Reiter
A.E. Gunnaes
K. Giannakopoulos
C. Mitterer
机构：
[1] University of Leoben,Christian Doppler Laboratory for Advanced Hard Coatings, Department of Physical Metallurgy and Materials Testing
[2] University of Cyprus,Department of Mechanical and Manufacturing Engineering
[3] University of Surrey,The Surface Analysis Laboratory, Faculty of Engineering and Physical Sciences
[4] PLANSEE Composite Materials GmbH,Department of Physics, Blindern
[5] Oerlikon Balzers AG,Department of Mechanical and Manufacturing Engineering
[6] University of Oslo,undefined
[7] University of Cyprus,undefined
[8] IMS/NCSR Demokritos,undefined
[9] Terma Patriarchou Grigoriou,undefined
[10] Aghia Paraskevi,undefined
来源：
Journal of Materials Research | 2008年 / 23卷
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摘要：
Nanocomposite Cr–B–N coatings were deposited from CrB0.2 compound targets by reactive arc evaporation using an Ar/N2 discharge at 500 °C and −20 V substrate bias. Elastic recoil detection (ERDA), x-ray photoelectron spectroscopy (XPS), x-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), and selected-area electron diffraction (SAED) were used to study the effect of the N2 partial pressure on composition and microstructure of the coatings. Cross-sectional scanning electron microscopy (SEM) showed that the coating morphology changes from a glassy to a columnar structure with increasing N2 partial pressure, which coincides with the transition from an amorphous to a crystalline growth mode. The saturation of N content in the coating confirms the formation of a thermodynamically stable CrN–BN dual-phase structure at higher N2 fractions, exhibiting a maximum in hardness of approximately 29 GPa.
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页码：3048 / 3055
页数：7
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