Investigation of a Surface Layer Formed on Silica Glass as a Result of Mechanical-Chemical and Ionic Polishing

被引:0
作者
V. M. Zolotarev
机构
[1] St. Petersburg National University of Information Technologies,
[2] Mechanics,undefined
[3] and Optics,undefined
来源
Optics and Spectroscopy | 2022年 / 130卷
关键词
surface layer; silica glass; formation mechanism; mechanical-chemical and ionic polishing methods;
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页码:573 / 584
页数:11
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