Energy and Temperature Dependence of the Secondary Ion Emission of GaN/SiC Clusters under Cesium-Ion Bombardment

被引：0
|
作者：
B. G. Atabaev
R. Djabbarganov
M. Kh. Akhmadjanova
K. U. Nazarkulova
机构：
[1] Arifov Institute of Ion-Plasma and Laser Technologies,
[2] Uzbekistan Academy of Sciences,undefined
[3] Institute of General and Inorganic Chemistry,undefined
[4] Uzbekistan Academy of Sciences,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2021年 / 15卷
关键词：
sputtering; secondary ion mass spectrometry; cluster; gallium nitrogen; emission; negative ion; threshold energy;
D O I：
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学科分类号：
摘要：
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页码：259 / 262
页数：3
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