Mechanism-based design of precursors for focused electron beam-induced deposition

被引：0
作者：
Will G. Carden
Hang Lu
Julie A. Spencer
D. Howard Fairbrother
Lisa McElwee-White
机构：
[1] University of Florida,Department of Chemistry
[2] Johns Hopkins University,Department of Chemistry
[3] United States Naval Academy,Department of Chemistry
来源：
MRS Communications | 2018年 / 8卷
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摘要：
Focused electron beam-induced deposition (FEBID) is capable of producing metal-containing nanostructures with lateral resolution on the sub-nanometer scale. Practical application of this nanofabrication technique has been hindered by ligand-derived contamination from precursors developed for thermal deposition methods. Mechanistic insight into FEBID through surface science studies and gas-phase electron-molecule interactions has begun to enable the design of custom FEBID precursors. These studies have shown that precursors designed to decompose under electron irradiation can produce high-purity FEBID deposits. Herein, we highlight the progress in FEBID precursor development with several examples that incorporate this mechanism-based design approach.
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页码：343 / 357
页数：14
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