The influence of mixed phases on optical properties of HfO2 thin films prepared by thermal oxidation

被引：0
|
作者：
Yizhu Xie
Ziwei Ma
Yuroug Su
Yanxia Liu
Lixin Liu
Haiting Zhao
Jinyuan Zhou
Zhenxing Zhang
Jian Li
Erqing Xie
机构：
[1] Lanzhou University,Key Laboratory for Magnetism and Magnetic Materials of the Ministry of Education
来源：
Journal of Materials Research | 2011年 / 26卷
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摘要：
Hafnium dioxide (HfO2) thin films were synthesized on silicon and quartz substrates by thermal oxidation of metallic hafnium films in oxygen. The crystalline structure and optical properties of the HfO2 films were systematically investigated using x-ray diffraction, ultraviolet (UV)-Raman, and UV-visible spectrophotometer techniques. All the films thermally oxidized at 450 to 800 °C were mostly monoclinic. Interestingly, cubic phase coexisted with monoclinic phase in the films thermally oxidized at 500 to 600 °C. The corresponding optical band gap (Eg) varied from 5.92 to 6.08 eV for the films with a different phase ratio (cubic to monoclinic one) ranging between 0 and 1:3. These results imply that the mixed phase could have a certain effect on the increase of the Eg of HfO2 films.
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页码：50 / 54
页数：4
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