Investigation of the Electrochemical Stop Etching of Silicon Upon the Fabrication of Cantilevers

被引：0

作者：

A. V. Novak

V. R. Novak

机构：

[1] National Research University of Electronic Technology (MIET),

[2] JSC “Angstrem”,undefined

[3] LLC “NT-MDT”,undefined

来源：

Semiconductors | 2020年 / 54卷

关键词：

anisotropic etching in KOH; electrochemical stop etching; membrane; cantilever;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：1791 / 1795

页数：4

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