Micro-Grinding Performance of Hard-Brittle Chip Materials in Precision Micro-Grinding Microgroove

被引：1

作者：

Zhang L. ^{[1
,2
]}

Xie J. ^{[2
]}

Zhu L. ^{[1
]}

Lu Y. ^{[3
]}

机构：

[1] State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai

[2] School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou

[3] College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, Guangdong

来源：

Journal of Shanghai Jiaotong University (Science) | 2018年 / 23卷 / Suppl 1期

关键词：

A; crystal orientation; hard-brittle chip materials (HBCMs); precision micro-grinding; TH; 16;

D O I：

10.1007/s12204-018-2025-7

中图分类号：

学科分类号：

摘要：

The micro-structure on hard-brittle chip materials (HBCMs) surface can produce predominant functions and features. The micro-grinding with diamond wheel micro-tip is an efficient method to machine microstructure on HBCMs. However, different HBCMs and crystal orientation may have a significant influence on the micro-grinding performance. In this paper, the micro-grinding performance along different crystal orientation of HBCMs is investigated. First, a dressed 600# diamond grinding wheel is used to micro-grind micro-structure on HBCMs. Then, the experiment of micro-grinding force test is completed. Finally, the quality of microgroove, the grinding ratio and the micro-grinding force are investigated and they are related to the crystal orientation of HBCMs. It is shown that the stronger resistance to the micro-crack propagation has the best quality of microgroove and the smallest grinding ratio. Moreover, the hardest single-crystal SiC has the best machinability and the micro-grinding force is 38.9%, 10.8% and 46.8% less than the one of sapphire, single-crystal Si and quartz glass, respectively. The direction to micro-grind easily is the crystal orientation 〈101 ¯ 0〉 for single-crystal SiC and sapphire. In addition, the micro-grinding force increases with the increase of the micro-grinding depth and feed rate and decreases with the increase of the grinding wheel speed. © 2018, Shanghai Jiaotong University and Springer-Verlag GmbH Germany, part of Springer Nature.

引用

页码：70 / 76

页数：6

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