Interferometric Methods for Surface Testing. High-Order White-Light Interferometer

被引：0
作者：
I. E. Kozhevatov
E. Kh. Kulikova
机构：
[1] Radiophysical Research Institute,
来源：
Instruments and Experimental Techniques | 2001年 / 44卷
关键词：
Physical Chemistry; Surface Profile; Technological Field; Surface Test; Optical Surface;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A high-order white-light interferometer for three-dimensional fast noncontact testing of optical surface profiles is described. The device ensures measurements of absolute flatness deviations to an accuracy of ∼λ/1000 within a wide technological field of ∼80 mm (the resolution in the plane is ∼0.1 mm).
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页码：84 / 87
页数：3
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