The magneto-optical properties of [{(Co45Fe45 Zr10)Z(Al2 O3)100-Z}X/ (α-Si)Y]40 multilayer nanoheterostructures with different thicknesses of granular ferromagnetic layers and semiconductor interlayers have been investigated. It is found that the composition layer thickness and the concentration of the ferromagnetic component affect significantly the Si interlayer formation. © Allerton Press, Inc. 2009.