Hard carbon coatings deposited by pulsed high current magnetron sputtering

被引：0
|
作者：
K. V. Oskomov
A. A. Solov’ev
S. V. Rabotkin
机构：
[1] Russian Academy of Sciences,Institute of High Current Electronics, Siberian Branch
来源：
Technical Physics | 2014年 / 59卷
关键词：
Friction Coefficient; Wear Rate; Carbon Coating; Wear Resistant Coating; Negative Bias Voltage;
D O I：
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中图分类号：
学科分类号：
摘要：
Hard (up to 17 GPa) carbon coatings are deposited onto face SiC bearings used in liquid pumps by pulsed high-current magnetron sputtering of graphite. As a result, the friction coefficient is decreased from 0.43 to 0.11 and the wear rate is decreased from 26 to 0.307 μm3 N−1 m−1, which increases the service life of the bearings by approximately three times. The deposited carbon coatings have a high hardness and wear resistance due to the generation of high-density (up to 1013 cm−3) plasma.
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页码：1811 / 1814
页数：3
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