The structure and mechanical and tribological properties of TiBCN nanocomposite coatings

被引:141
作者
Lin, Jianliang [1 ]
Moore, John J. [1 ]
Mishra, Brajendra [1 ]
Pinkas, Malki [2 ]
Sproul, William D. [1 ,3 ]
机构
[1] Colorado Sch Mines, ACSEL, Golden, CO 80401 USA
[2] Nucl Res Ctr, Negev, Israel
[3] React Sputtering Inc, San Marcos, CA 92078 USA
关键词
TiBCN coating; Nanocomposite coating; Nanocrystalline coating; Pulsed magnetron sputtering; Wear; TI-B-C; SPUTTERING P-CFUBMS; THIN-FILMS; N COATINGS; HARD COATINGS; SUPERHARD COATINGS; ARC EVAPORATION; DEPOSITION; NANOSTRUCTURE; INDENTATION;
D O I
10.1016/j.actamat.2009.10.063
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
TiBCN nanocomposite coatings were deposited in a closed field unbalanced magnetron sputtering system using pulsed magnetron sputtering of a TiBC compound target with various Ar/N-2 mixtures. TiBCN coatings were characterized using X-ray diffraction, X-ray photoelectron spectroscopy, transmission electron microscopy, nanoindentation, Rockwell C indentation and ball-on-disk wear tests. The coatings with a nitrogen content of less than 8 at.% exhibited superhardness values in the range of 44-49 GPa, but also showed poor adhesion and low wear resistance. Improvements in the coating adhesion, H/E ratio and wear resistance were achieved together with a decrease in the coating hardness to 35-45 GPa as the N content in the coatings was increased from 8 to 15 at.%. The microstructure of the coatings changed from a nano-columnar to a nanocomposite structure in which 5-8 nm nanocrystalline Ti(B,C) and Ti(N,C) compounds were embedded in an amorphous matrix consisting of BN, free carbon and CN phases. With a further increase in the N content in the coatings to levels greater than 20 at.%, the inter-particle spacing of the nanocrystalline compounds increased significantly due to the formation of a large amount of the amorphous BN phase, which also led to low hardness and poor wear resistance of the TiBCN coatings. Published by Elsevier Ltd. on behalf of Acta Materialia Inc.
引用
收藏
页码:1554 / 1564
页数:11
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