Modification of the surfaces of stainless steel during titanium nitride deposition by a dynamic mixing method

被引：2

作者：

Yokota, K ^{[1
]}

Tamura, S

Nakamura, K

Horiguchi, M

Nakaiwa, H

Sugimoto, T

Akamatsu, K

Nakao, K

机构：

[1] Kansai Univ, Fac Engn, Dept Elect, Suita, Osaka 5648680, Japan

[2] High Technol Res Ctr, Suita, Osaka 5648680, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2000年 / 166卷

关键词：

titanium nitride; thin film; dynamic mixing; stainless steel;

D O I：

10.1016/S0168-583X(99)01168-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Surfaces of stainless steel SUS304 were coated with titanium nitride (TIN) at temperatures ranging from 400 degrees C to 770 degrees C using a dynamic mixing technique. The N+ ions were accelerated at energies of 0.5-2.0 keV, and were implanted into the stainless steel. The composition of the prepared TiN films was measured using Rutherford backscattering spectrometry with lie ions at an energy of 2.0 MeV. Intermediate layers containing compounds such as FesNq, Cr2N, and CrFe were formed between the TiN films and substrates at substrate temperatures higher than 700 degrees C. The thickness of the TIN films decreased significantly when the intermediate layers were formed. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：87 / 91

页数：5

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