Structural and optical properties of Zn(Mg,Cd)O alloy films grown by remote-plasma-enhanced MOCVD

被引：50

作者：

Yamamoto, Kenji ^{[1
]}

Tsuboi, Takako ^{[2
]}

Ohashi, Toshiya ^{[2
]}

Tawara, Takehiko ^{[3
]}

Gotoh, Hideki ^{[3
]}

Nakamura, Atsushi ^{[2
]}

Temmyo, Jiro ^{[1
,2
]}

机构：

[1] Shizuoka Univ, Grad Sch Sci & Technol, Naka Ku, Hamamatsu, Shizuoka 4328011, Japan

[2] Shizuoka Univ, Elect Res Inst, Naka Ku, Hamamatsu, Shizuoka 4328011, Japan

[3] NTT Corp, NTT Basic Res Lab, Atsugi, Kanagawa 2430198, Japan

来源：

JOURNAL OF CRYSTAL GROWTH | 2010年 / 312卷 / 10期

基金：

日本学术振兴会;

关键词：

Photoluminescence; Remote-plasma-enhanced MOCVD; Zn(Mg; Cd)O alloys; Semiconducting II-VI materials; MOLECULAR-BEAM EPITAXY; LIGHT-EMITTING-DIODES; BAND-GAP; LOCALIZED STATES; MGXZN1-XO; EXCITONS; SPECTRA; ALGAN; BLUE;

D O I：

10.1016/j.jcrysgro.2010.02.029

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

We report the structural and optical properties of wurtzite-structure Zn(Mg,Cd)O ternary alloys. Wurtzite (0 0 0 1) Zn1-xCdxO and MgyZn1-yO films were grown on (11-20) sapphire substrates using remote-plasma-enhanced metalorganic chemical vapor deposition. The large bowing parameters of Zn1-xCdxO and MgyZn1-yO ternary alloys are 3.0 and 3.5, respectively, which reflects the large difference of each binary's electronegativity. We have analyzed the broadening of photoluminescence (PL) in Zn(Mg,Cd)O alloys on alloy content by taking into account the statistical alloy fluctuation and the localization of the exciton, and have clarified that the localization of the exciton strongly affects to PL full-width at half-maximum (FWHM) in Zn(Mg,Cd)O alloys. The alloy broadenings in steady-state PL of Zn(Mg,Cd)O alloys are in good agreement with the calculated tendency by the theoretical model based on the statistical alloy fluctuation, while PL FWHM of Zn1-xCdxO is three times larger than the calculated results. Moreover, as another way to confirm alloy broadening, we also have done time-resolved PL measurements and derived the localized depth of the exciton in ZnO-based system, indicating a good agreement with the tendency of PL FWHM broadening. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：1703 / 1708

页数：6

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