Cyanate ester tethered POSS/BACY nanocomposites for low-k dielectrics

被引:9
作者
Ariraman, Mathivathanan [1 ]
Sasikumar, Ramachandran [1 ]
Alagar, Muthukaruppan [1 ]
机构
[1] Anna Univ, Dept Chem Engn, Polymer Composites Lab, AC Tech, Madras 600025, Tamil Nadu, India
关键词
cyanate ester; eugenol; POSS; low-k; POLYHEDRAL OLIGOMERIC SILSESQUIOXANE; RESIN;
D O I
10.1002/pat.3724
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Low-k dielectrics have been developed as an interlayer insulating material in the large scale integrated circuitry devices by the copolymerization of various weight percentages (10, 20, 30, and 40wt%) of cyanate ester tethered POSS (POSS-OCN) and bisphenol-A cyanate ester (BACY) to obtain BACY/POSS-OCN nanocomposites. The reinforcement of POSS-OCN significantly contributes to the reduction in the value of dielectric constant and dielectric loss as well, which might be due to the presence of porous structured POSS-OCN. The 30wt% POSS-OCN/BACY nanocomposite possesses the lowest value of dielectric constant of 1.81 at 1MHz. Copyright (c) 2016 John Wiley & Sons, Ltd.
引用
收藏
页码:597 / 605
页数:9
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