X-ray absorption spectroscopy study on oxygen-deficient hafnium oxide film

被引:10
作者
Cho, D-Y [1 ]
Min, C-H [2 ,3 ]
Kim, J-Y [4 ]
Park, J-H [4 ,5 ,6 ]
Oh, S-J [2 ,3 ]
Hwang, C. S. [1 ]
机构
[1] Seoul Natl Univ, Semicond Res Ctr, Dept Mat Sci & Engn, Seoul 151742, South Korea
[2] Seoul Natl Univ, Dept Phys & Astron, Seoul 151742, South Korea
[3] Seoul Natl Univ, Ctr Strongly Correlated Mat Res, Seoul 151742, South Korea
[4] Pohang Univ Sci & Technol, Pohang Accelerator Lab, Pohang 790784, South Korea
[5] Pohang Univ Sci & Technol, Dept Phys, Pohang 790784, South Korea
[6] Pohang Univ Sci & Technol, ESSC, Pohang 790784, South Korea
来源
PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY | 2008年 / 100卷
关键词
D O I
10.1088/1742-6596/100/4/042044
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We investigated the influence of oxygen vacancy on the electronic and atomic distributions in hafnium oxide, using hard and soft x-ray absorption spectroscopies. Analyses on the Hf L-3-edge extended x-ray absorption fine structures revealed that the average Hf-O bond length reduces more than -0.1 angstrom in the presence of oxygen vacancy, consequently on the lattice relaxation. Furthermore, the O K-edge absorption spectrum shows additional band tail state beneath the genuine Hf 5d conduction band, which manifests a small occupation in Hf d shell in the oxygen-deficient oxide. However, the nonzero d occupation is found not to involve a ferromagnetic spin correlation by the absence of features in the Hf N-3-edge magnetic circular dichroism.
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页数:4
相关论文
共 4 条
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