Membrane buried-heterostructure DFB laser with an optically coupled III-V/Si waveguide

被引:16
作者
Aihara, Takuma [1 ]
Hiraki, Tatsurou [1 ]
Takeda, Koji [1 ]
Fujii, Takuro [1 ]
Kakitsuka, Takaaki [1 ]
Tsuchizawa, Tai [1 ]
Matsuo, Shinji [1 ]
机构
[1] NTT Corp, NTT Device Technol Labs, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 2430198, Japan
关键词
MACH-ZEHNDER MODULATOR; SEMICONDUCTOR-LASERS; SIO2/SI SUBSTRATE; THERMAL-ANALYSIS; INP;
D O I
10.1364/OE.27.036438
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We have developed a membrane buried-heterostructure (BH) distributed feedback (DFB) laser consisting of an optically coupled III-V/Si waveguide and SiN surface grating. A 230-nm-thick membrane III-V layer enables us to construct an optical supermode in a 220-nmthick Si waveguide and control the optical confinement factor in both the III-V and Si layers by changing Si waveguide width. This makes it possible to use a conventional Si photonics platform because the Si waveguides widely used on it are around 220-nm thick. To fabricate the BH-the key component for constructing a membrane laser with a lateral current-injection structure-we used direct wafer bonding and regrowth by metalorganic vapor phase epitaxy. Light output from the DFB laser is transferred to the Si waveguide through a short inverse-taper InP waveguide. A fiber-chip interface constructed by using inverse-taper Si waveguides and SiOx waveguides provides 2-dB fiber coupling loss. Fiber coupling power of 7.9 mW is obtained with a lambda/4-shifted DFB laser with a 500-mu m-long cavity. Single-mode lasing with a side-mode suppression ratio of 50 dB and lasing up to 120 degrees C are also demonstrated. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:36438 / 36448
页数:11
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