Fabrication of lotus-type porous silicon by unidirectional solidification in hydrogen

被引：27

作者：

Nakahata, T ^{[1
]}

Nakajima, H ^{[1
]}

机构：

[1] Osaka Univ, Inst Sci & Ind Res, Ibaraki, Osaka 5670047, Japan

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 2004年 / 384卷 / 1-2期

关键词：

Lotus-type; porous silicon; porosity; unidirectional solidification; hydrogen;

D O I：

10.1016/j.msea.2004.07.004

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Lotus-type porous silicon with many directional cylindrical gas pores was fabricated by unidirectional solidification of the melt dissolving hydrogen in a pressurized hydrogen atmosphere. The pores are elongated to the solidification direction and the size of the pores ranges from 10 mum to 1 mm in diameter, which is much larger than that in conventional nano-sized porous silicon. The porosity of 34% decreases to 10% with increasing pressure of hydrogen from 0.1 to 1.0 MPa. The average pore diameter also decreases with increase of the pressure. It is concluded that the pore evolution is attributed by the precipitation of the super-saturated hydrogen in the solidified silicon through melt. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：373 / 376

页数：4

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