Free-carrier effects and optical phonons in GaNAs/GaAs superlattice heterostructures measured by infrared spectroscopic ellipsometry

被引:0
作者
Sik, J [1 ]
Schubert, M
Hofmann, T
Gottschalch, V
机构
[1] Univ Nebraska, Ctr Microelect & Opt Mat Res, Lincoln, NE 68588 USA
[2] Univ Nebraska, Dept Elect Engn, Lincoln, NE 68588 USA
[3] Univ Leipzig, Fak Phys & Geowissensch, Arbeitsgrp Halbleiterphys, D-7010 Leipzig, Germany
[4] Univ Leipzig, Fak Chem & Mineral, D-7010 Leipzig, Germany
[5] Masaryk Univ, Fac Sci, Dept Solid State Phys, CS-61137 Brno, Czech Republic
[6] Masaryk Univ, Fac Sci, Lab Thin Films & Nanostruct, CS-61137 Brno, Czech Republic
来源
MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH | 2000年 / 5卷 / 03期
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T [工业技术];
学科分类号
08 ;
摘要
The infrared-optical properties of GaAs/GaNxAs1-x superlattice (SL) heterostructures (0 < x < 3.3%) are studied by variable angle-of-incidence infrared spectroscopic ellipsometry (IRSE) for wavenumbers from 250 cm(-1) to 700 cm(-1). The undoped SL structures where grown on top of a 300 nm thick undoped GaAs buffer layer on Te-doped (001) GaAs substrates by metal-organic vapor phase epitaxy (MOVPE). We observe the well-known Berreman-polariton effect within the GaAs LO-phonon region. We further observe a strong polariton-like resonance near the coupled longitudinal-optical plasmon-phonon frequency of the Te-doped substrate at 306 cm(-1). For analysis of the IRSE data we employ the harmonic oscillator dielectric function model and the Drude model for free-carrier response. The additional resonance feature is explained by pseudo surface polariton (PSP) interface modes between the Te-doped GaAs and the undoped GaAs buffer layer/SL film. We find that the PSP modes are extremely sensitive to free-carrier properties within the SL structures, and we obtain a strong increase in free-carrier concentration within the GaNAs SL sublayers with increasing x from analysis of the IRSE data. We further observe the localized vibrational modes of nitrogen at 470 cm(-1) in the GaNxAs1-xSL sublayers with a polar strength that increases linearly with x, and which can be used to monitor the nitrogen concentration in GaNxAs1-x.
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页码:1 / 8
页数:8
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