Ferroelectric and dielectric properties of sol-gel derived BaxSr1-xTiO3 thin films

被引：64

作者：

Adikary, SU ^{[1
]}

Chan, HLW

机构：

[1] Hong Kong Polytech Univ, Dept Appl Phys, Kowloon, Hong Kong, Peoples R China

[2] Hong Kong Polytech Univ, Ctr Mat Res, Kowloon, Hong Kong, Peoples R China

来源：

THIN SOLID FILMS | 2003年 / 424卷 / 01期

关键词：

barium strontium titanate; dielectric properties; grain size;

D O I：

10.1016/S0040-6090(02)00918-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ferroelectric thin films of Ba0.7Sr0.3TiO3, Ba0.8Sr0.2TiO3, Ba0.9Sr0.1TiO3 and BaTiO3 were fabricated by a modified sol-gel technique on Pt/Ti/SiO2/Si substrates. All the compositions crystallized in perovskite structure and consist of well-defined grains. As the value of x increases grain size of the BaxSr1-xTiO3 thin films increases while the dielectric permittivity decreases. Ba0.7Sr0.3TiO3 composition possesses the highest dielectric permittivity of 748 (at 100 kHz). Hysteresis loops measured at room temperature for all compositions showed that BaTiO3 has the largest remnant polarization of 4.8 muC/cm(2). The dielectric and ferroelectric properties of the sol-gel derived BaxSr1-xTiO3 thin films are strongly dependent on the Sr content and the grain size. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：70 / 74

页数：5

共 7 条

[1]

Adikary SU, 2001, FERROELECTRICS, V262, P1261, DOI 10.1080/00150190108225164

[2]

AKDOGAN EK, 1999, HDB LOW HIGH DIELECT, V2, P85

[3] Characterization of sputtered barium strontium titanate and strontium titanate thin films [J].

Baumert, BA ;

Chang, LH ;

Matsuda, AT ;

Tsai, TL ;

Tracy, CJ ;

Gregory, RB ;

Fejes, PL ;

Cave, NG ;

Taylor, DJ ;

Otsuki, T ;

Fujii, E ;

Hayashi, S ;

Suu, K .

JOURNAL OF APPLIED PHYSICS, 1997, 82 (05) :2558-2566

[4] Ferroelectricity in sol-gel derived Ba0.8Sr0.2TiO3 thin films using a highly diluted precursor solution [J].

Cheng, JG ;

Meng, XJ ;

Li, B ;

Tang, J ;

Guo, SL ;

Chu, JH ;

Wang, M ;

Wang, H ;

Wang, Z .

APPLIED PHYSICS LETTERS, 1999, 75 (14) :2132-2134

[5] Studies on structural and electrical properties of barium strontium titanate thin films developed by metallo-organic decomposition [J].

Krupanidhi, SB ;

Peng, CJ .

THIN SOLID FILMS, 1997, 305 (1-2) :144-156

[6] Microstructure and ferroelectric properties of fine-grained BaxSr1-xTiO3 thin films prepared by metalorganic decomposition [J].

Mohammed, MS ;

Naik, R ;

Mantese, JV ;

Schubring, NW ;

Micheli, AL ;

Catalan, AB .

JOURNAL OF MATERIALS RESEARCH, 1996, 11 (10) :2588-2593

[7]

SENEGUPTA LC, 1995, P 1994 IEEE 13 INT S, P622

← 1 →