Enhanced Mechanical Properties of Metallic Glass Thin Films via Modification of Structural Heterogeneity

被引：5

作者：

Ma, Xindi ^{[1
]}

Sun, Kang ^{[1
]}

Li, Peiyou ^{[2
]}

Zhang, Nizhen ^{[1
]}

Wang, Qing ^{[1
]}

Wang, Gang ^{[1
]}

机构：

[1] Shanghai Univ, Inst Mat, Shanghai 200444, Peoples R China

[2] Shaanxi Univ Technol, Sch Mat Sci & Engn, Hanzhong 723001, Peoples R China

来源：

MATERIALS | 2021年 / 14卷 / 04期

关键词：

metallic glass thin films; magnetron sputtering; structure; nanoindentation; nano-scratch; RELAXATION; DEFORMATION; BEHAVIOR; ZONES; FLOW;

D O I：

10.3390/ma14040999

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The structure of Cu50Zr50 and Co56Ta35B9 metallic glass thin films (MGTF) was effectively tailored via various applied substrate temperatures by means of the magnetron sputtering technology. Obviously enhanced hardness and elastic modulus are achieved by different compositional MGTFs by increasing the substrate temperature. Compared with the CuZr MGTFs, the CoTaB MGTF deposited at 473 K displays the smaller strain-rate sensitivity exponent, m, and a weaker spectrum intensity based on the nanoindentation creep test, suggesting its better creep resistance. In addition, the STZ volume of the CoTaB MGTF significantly decreases after depositing at higher temperature. According to the nano-scratch analysis, the CoTaB MGTF at the substrate temperatures of 473 K performs the shallower scratch width and the larger H-3/E-2 value, indicating its better tribological property.

引用

页码：1 / 12

页数：12

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