Observation of surface blistering by grazing incidence electron microscopy

被引：12

作者：

Muto, S ^{[1
]}

Matsui, T

Tanabe, T

机构：

[1] Nagoya Univ, Ctr Integrated Res Sci & Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan

[2] Nagoya Univ, Grad Sch Engn, Dept Nucl Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2000年 / 39卷 / 6A期

关键词：

transmission electron microscopy; grazing incidence electron microscopy; electron energy-loss spectroscopy; surface blistering; reflection electron microscopy;

D O I：

10.1143/JJAP.39.3555

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrate grazing incidence electron microscopy (GIEM) for observation of surface blistering introduced by energetic particle bombardment. This method enebles us direct and nondestructive observation and characterization of surface protrusions without any modification of the microscope, when it is used in combination with associated analytical instruments. As an example, the surface blistering of D+-irradiated single crystalline silicon was examined with the aid of the simultaneous application of electron energy-loss spectroscopy (EELS).

引用

页码：3555 / 3556

页数：2

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