Properties of flexible DLC film deposited by amplitude-modulated RF P-CVD

被引：76

作者：

Nakahigashi, T ^{[1
]}

Tanaka, Y ^{[1
]}

Miyake, K ^{[1
]}

Oohara, H ^{[1
]}

机构：

[1] Nippon ITF Inc, Minami Ku, Kyoto 6018205, Japan

来源：

TRIBOLOGY INTERNATIONAL | 2004年 / 37卷 / 11-12期

关键词：

DLC; plasma; CVD; low friction; polymer material;

D O I：

10.1016/j.triboint.2004.07.007

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

The flexible DLC film is one of the novel techniques to deposit the DLC film on polymer materials such as rubber and resin, which does not cause any peeling-off of the film even with the deformation of the substrates. It was found that the DLC film deposited by modulated RF plasma-CVD, has the features of (1) small friction, (2) small wear (less than Teflon), (3) high water repellency (90degrees contact angle for pure water), (4) good insulation characteristic (surface resistance on the order of 10(12) Omega cm), (5) less peeling-off due to expansion and contraction of the polymer material, and (6) deposition at lower temperatures (below 80degrees). This new DLC film is applied to the rubber seal ring (O-ring) for zoom lens system of 35 mm turn compact cameras. The flexible DLC technique is expected to expand itself and to create wider applications of DLC films. (C) 2004 Elsevier Ltd. All rights reserved.

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页码：907 / 912

页数：6

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