The Improved Resonator Method for Measuring the Complex Permittivity of Materials

被引:5
|
作者
Parkhomenko, M. P. [1 ]
Kalenov, D. S. [1 ]
Fedoseev, N. A. [1 ]
Eremin, I. S. [1 ]
Kolesnikova, V. M. [1 ]
Kovtykov, D. A. [1 ]
机构
[1] Russian Acad Sci, Fryazino Branch, Kotelnikov Inst Radio Engn & Elect, Fryazino 141190, Moscow Oblast, Russia
关键词
D O I
10.1134/S106422691706016X
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An improved resonator method for determination of the complex permittivity of materials in a reflective resonator is presented. The method is specific in the following. In the obtained relationship, imaginary part epsilon(2) of the permittivity of an investigated material is determined using the variation of the resonance frequency and coupling coefficient of the resonator observed when a specimen is introduced, which increases the measurement accuracy. The method is approbated in the investigations of high-resistance silicon specimens.
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页码:759 / 764
页数:6
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