Thermomechanical noise of nanooscillators with time-dependent mass

被引：6
作者：
Djuric, Zoran G. [1 ]
Jokic, Ivana M. [1 ]
机构：
[1] Inst Microelect Technol & Single Crystals, Belgrade 11000, Serbia
来源：
MICROELECTRONIC ENGINEERING | 2007年 / 84卷 / 5-8期
关键词：
thermomechanical noise; adsorption-desorption; nanoscale mechanical oscillators; microcantilevers; nanocantilevers;
D O I：
10.1016/j.mee.2007.01.172
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We consider the influence of adsorption-desorption (AD) kinetics on the response of micro/nanocantilever oscillators. We utilize the calculated response to analyze an oscillator with variable mass and determine the autocorrelation function and noise power spectrum for its deflection fluctuations caused by Brownian motion (thermomechanical noise). This is done by applying the Onsager's regression hypothesis. The presented theory can be used to study the influence of the unavoidable AD processes on measurements done using atomic force microscope or micro/nanocantilever sensors as well as the AD process kinetics itself. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：1639 / 1642
页数：4
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