Study on Deposition of NCD on AFM Probe

被引：1

作者：

Huang, Mingmin ^{[1
]}

Zuo, Dunwen ^{[1
]}

Lu, Wenzhuang ^{[1
]}

Xu, Feng ^{[1
]}

Wang, Min ^{[1
]}

机构：

[1] Nanjing Univ Aeronaut & Astronaut, Coll Mech & Elect Engn, Nanjing 210016, Peoples R China

来源：

MACHINING AND ADVANCED MANUFACTURING TECHNOLOGY X | 2010年 / 431-432卷

关键词：

Nanocrystalline diamond film; NCD; AFM; Probe; DIAMOND FILMS;

D O I：

10.4028/www.scientific.net/KEM.431-432.499

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

The performance of Atomic Force Microscope (AFM) is greatly determined by the quality of its probe. Nowadays, probes of diamond tips have become more and more popular than silicon ones, and have been widely used in industries. In this paper, research about the fabricating of nanocrystalline diamond (NCD) coated AFM probe has been done using Hot-Filament Chemical Vapour Deposition (HFCVD) technique. The results showed that NCD films have been grown on the probe. Problems about the growth of NCD on the tips have been discussed. The optimum parameters have also been proposed. This research can provide reference for the further experiments on the fabrication of NCD coated tips.

引用

页码：499 / 502

页数：4

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