Electrostatic pull-in application in flexible devices: A review

被引：4

作者：

Cai, Teng ^{[1
,2
,3
]}

Fang, Yuming ^{[1
,2
,3
]}

Fang, Yingli ^{[1
,2
,3
]}

Li, Ruozhou ^{[1
,2
,3
]}

Yu, Ying ^{[1
,2
,3
]}

Huang, Mingyang ^{[1
,2
,3
]}

机构：

[1] Nanjing Univ Posts & Telecommun, Coll Elect & Opt Engn, Nanjing, Peoples R China

[2] Nanjing Univ Posts & Telecommun, Coll Microelect, Nanjing, Peoples R China

[3] Nanjing Univ Posts & Telecommun, Natl & Local Joint Engn Lab RF Integrat & Microas, Nanjing, Peoples R China

来源：

BEILSTEIN JOURNAL OF NANOTECHNOLOGY | 2022年 / 13卷

关键词：

electrostatics; MEMS; microfluidics; NEM switches; pull-in; SWITCH; PERFORMANCE; BEAM; ACTUATORS; DESIGN; ROBUST;

D O I：

10.3762/bjnano.13.32

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The electrostatic pull-in effect is a common phenomenon and a key parameter in the design of microscale and nanoscale devices. Flexible electronic devices based on the pull-in effect have attracted increasing attention due to their unique ductility. This review summarizes nanoelectromechanical switches made by flexible materials and classifies and discusses their applications in, among others, radio frequency systems, microfluidic systems, and electrostatic discharge protection. It is supposed to give researchers a more comprehensive understanding of the pull-in phenomenon and the development of its applications. Also, the review is meant to provide a reference for engineers to design and optimize devices.

引用

页码：390 / 403

页数：14

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