Study of AFM-based nanometric cutting process using molecular dynamics

被引:111
作者
Zhu, Peng-zhe [1 ]
Hu, Yuan-zhong [1 ]
Ma, Tian-bao [1 ]
Wang, Hui [1 ]
机构
[1] Tsinghua Univ, State Key Lab Tribol, Beijing 100084, Peoples R China
基金
中国国家自然科学基金;
关键词
Molecular dynamics; Nanometric cutting; AFM; EMBEDDED-ATOM-METHOD; DISLOCATION NUCLEATION; PIN TOOL; SCALE; SIMULATIONS; LITHOGRAPHY; COPPER; FILMS; CU;
D O I
10.1016/j.apsusc.2010.05.044
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Three-dimensional molecular dynamics (MD) simulations are conducted to investigate the atomic force microscope (AFM)-based nanometric cutting process of copper using diamond tool. The effects of tool geometry, cutting depth, cutting velocity and bulk temperature are studied. It is found that the tool geometry has a significant effect on the cutting resistance. The friction coefficient (cutting resistance) on the nanoscale decreases with the increase of tool angle as predicted by the macroscale theory. However, the friction coefficients on the nanoscale are bigger than those on the macroscale. The simulation results show that a bigger cutting depth results in more material deformation and larger chip volume, thus leading to bigger cutting force and bigger normal force. It is also observed that a higher cutting velocity results in a larger chip volume in front of the tool and bigger cutting force and normal force. The chip volume in front of the tool increases while the cutting force and normal force decrease with the increase of bulk temperature. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:7160 / 7165
页数:6
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