Convective phenomena in large melts including magnetic fields

被引:49
作者
Muiznieks, A.
Krauze, A.
Nacke, B.
机构
[1] Latvian State Univ, Fac Math & Phys, LV-1002 Riga, Latvia
[2] Inst Phys, Salaspils, Latvia
[3] Inst Electrothermal Proc, Hannover, Germany
关键词
computer simulation; fluid flows; stirring; magnetic field assisted Czochralski method; semiconducting silicon;
D O I
10.1016/j.jcrysgro.2006.12.051
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The set of characteristic parameters which describe modern large industrial CZ silicon single crystal growth systems is introduced. The main melt flow driving mechanisms are considered, and the characteristic density values of various in the melt acting forces are estimated. The analysis is illustrated with examples of numerical simulation and comparisons with experiments. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:211 / 220
页数:10
相关论文
共 7 条
[1]   Physical modelling of the melt flow during large-diameter silicon single crystal growth [J].
Gorbunov, L ;
Pedchenko, A ;
Feodorov, A ;
Tomzig, E ;
Virbulis, J ;
Ammon, WV .
JOURNAL OF CRYSTAL GROWTH, 2003, 257 (1-2) :7-18
[2]   Numerical 2D modelling of turbulent melt flow in CZ system with dynamic magnetic fields [J].
Krauze, A ;
Muiznieks, A ;
Mühlbauer, A ;
Wetzel, T ;
Gorbunov, L ;
Pedchenko, A ;
Virbulis, J .
JOURNAL OF CRYSTAL GROWTH, 2004, 266 (1-3) :40-47
[3]   Numerical 3D modelling of turbulent melt flow in a large CZ system with horizontal DC magnetic field.: II.: Comparison with measurements [J].
Krauze, A ;
Muiznieks, A ;
Mühlbauer, A ;
Wetzel, T ;
Tomzig, E ;
Gorbunov, L ;
Pedchenko, A ;
Virbulis, J .
JOURNAL OF CRYSTAL GROWTH, 2004, 265 (1-2) :14-27
[4]   Numerical 3D modelling of turbulent melt flow in large CZ system with horizontal DC magnetic field-I:: flow structure analysis [J].
Krauze, A ;
Muiznieks, A ;
Mülbauer, A ;
Wetzel, T ;
von Ammon, W .
JOURNAL OF CRYSTAL GROWTH, 2004, 262 (1-4) :157-167
[5]  
SEIDL A, 1995, THESIS ERLANGEN
[6]  
WETZEL T, 2005, THESIS
[7]  
WETZEL T, 2001, THESIS VDI VERLAG DU