Membrane-supported coplanar waveguides for MMIC and sensor application

被引：23

作者：

Dehe, A ^{[1
]}

Klingbeil, H ^{[1
]}

Weil, C ^{[1
]}

Hartnagel, HL ^{[1
]}

机构：

[1] Tech Univ Darmstadt, Inst Hochfrequenztech, D-64283 Darmstadt, Germany

来源：

IEEE MICROWAVE AND GUIDED WAVE LETTERS | 1998年 / 8卷 / 05期

关键词：

coplanar waveguide; field simulation; gallium arsenide; membrane; micromachining; MMIC;

D O I：

10.1109/75.668704

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Membrane-supported coplanar waveguides (CPW's) are needed for low-dispersive and low-loss millimeter-and submillimeter waves as well as for power sensor applications. This letter demonstrates CPW's on polyimid membranes micromachined on gallium arsenide (GaAs) that meet the requirements of a typical microwave monolithic integrated circuit (MMIC) process. The influence of the design parameters is simulated by finite difference in frequency domain (FDFD), in excellent agreement with the experiment. For a membrane CPW with ground to ground spacing of only 50 mu m and characteristic impedance of 115 Omega, relative effective dielectric constants near 1.02 and attenuation of 0.14 dB/mm at 25 GHz have been achieved.

引用

页码：185 / 187

页数：3

共 7 条

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[6] Coplanar waveguides on dielectric membranes micromachined on a GaAs substrate
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[7] HIGH-PERFORMANCE MICROSHIELD LINE COMPONENTS
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