Growth of β-Ga2O3 single crystals using vertical Bridgman method in ambient air

被引:251
作者
Hoshikawa, K. [1 ]
Ohba, E. [2 ]
Kobayashi, T. [2 ]
Yanagisawa, J. [2 ]
Miyagawa, C. [2 ]
Nakamura, Y. [2 ]
机构
[1] Shinshu Univ, Fac Engn, 500 Wakasato, Nagano 380, Japan
[2] Fujikoshi Machinery Corp, Nagano, Japan
关键词
Bridgman technique; Growth from melt; Single crystal growth; Oxides; Semiconducting gallium compounds; CONDUCTIVITY; EDGE;
D O I
10.1016/j.jcrysgro.2016.04.022
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
A new approach to beta-Ga2O3 single crystal growth was studied, using the vertical Bridgman (VB) method in ambient air, while measuring the beta-Ga2O3 melting temperature and investigating the effects of crucible composition and shape. beta-Ga2O3 single crystals 25 mm in diameter were grown in platinum rhodium alloy crucibles in ambient air, with no adhesion of the crystals to the crucible wall. Single crystal growth without a crystal seed was realized by (100) faceted growth with a growth direction perpendicular to the (100) faceted plane. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:36 / 41
页数:6
相关论文
共 26 条
[1]   Growth of β-Ga2O3 Single Crystals by the Edge-Defined, Film Fed Growth Method [J].
Aida, Hideo ;
Nishiguchi, Kengo ;
Takeda, Hidetoshi ;
Aota, Natsuko ;
Sunakawa, Kazuhiko ;
Yaguchi, Yoichi .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (11) :8506-8509
[2]   Czochralski growth and characterization of β-Ga2O3 single crystals [J].
Galazka, Z. ;
Uecker, R. ;
Irmscher, K. ;
Albrecht, M. ;
Klimm, D. ;
Pietsch, M. ;
Bruetzam, M. ;
Bertram, R. ;
Ganschow, S. ;
Fornari, R. .
CRYSTAL RESEARCH AND TECHNOLOGY, 2010, 45 (12) :1229-1236
[3]   On the bulk β-Ga2O3 single crystals grown by the Czochralski method [J].
Galazka, Zbigniew ;
Irmscher, Klaus ;
Uecker, Reinhard ;
Bertram, Rainer ;
Pietsch, Mike ;
Kwasniewski, Albert ;
Naumann, Martin ;
Schulz, Tobias ;
Schewski, Robert ;
Klimm, Detlef ;
Bickermann, Matthias .
JOURNAL OF CRYSTAL GROWTH, 2014, 404 :184-191
[4]   CRYSTAL STRUCTURE OF BETA-GA2O3 [J].
GELLER, S .
JOURNAL OF CHEMICAL PHYSICS, 1960, 33 (03) :676-684
[5]  
Gurvich L.V., 1981, THERMODYNAMIC PROP 1, V3
[6]   Development of gallium oxide power devices [J].
Higashiwaki, Masataka ;
Sasaki, Kohei ;
Kuramata, Akito ;
Masui, Takekazu ;
Yamakoshi, Shigenobu .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2014, 211 (01) :21-26
[7]   Gallium oxide (Ga2O3) metal-semiconductor field-effect transistors on single-crystal β-Ga2O3 (010) substrates [J].
Higashiwaki, Masataka ;
Sasaki, Kohei ;
Kuramata, Akito ;
Masui, Takekazu ;
Yamakoshi, Shigenobu .
APPLIED PHYSICS LETTERS, 2012, 100 (01)
[8]   Vertical Bridgman growth of sapphire-Seed crystal shapes and seeding characteristics [J].
Hoshikawa, K. ;
Osada, J. ;
Saitou, Y. ;
Ohba, E. ;
Miyagawa, C. ;
Kobayashi, T. ;
Yanagisawa, J. ;
Shinozuka, M. ;
Kanno, K. .
JOURNAL OF CRYSTAL GROWTH, 2014, 395 :80-89
[9]   FLUX GROWTH AND CHARACTERIZATION OF BETA-GA2O3 SINGLE CRYSTALS [J].
KATZ, G ;
ROY, R .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1966, 49 (03) :168-&
[10]   Growth of oxide compounds under dynamic atmosphere composition [J].
Klimm, D. ;
Ganschow, S. ;
Schulz, D. ;
Bertram, R. ;
Uecker, R. ;
Reiche, R. ;
Fornari, R. .
JOURNAL OF CRYSTAL GROWTH, 2009, 311 (03) :534-536