Ultra-high resistive switching mechanism induced by oxygen ion accumulation on nitrogen-doped resistive random access memory

被引:27
作者
Chu, Tian-Jian [1 ]
Tsai, Tsung-Ming [1 ]
Chang, Ting-Chang [2 ]
Chang, Kuan-Chang [1 ]
Pan, Chih-Hung [1 ]
Chen, Kai-Huang [3 ]
Chen, Jung-Hui [4 ]
Chen, Hsin-Lu [5 ]
Huang, Hui-Chun [1 ]
Shih, Chih-Cheng [1 ]
Syu, Yong-En [2 ]
Zheng, Jin-Cheng [6 ]
Sze, Simon M. [2 ]
机构
[1] Natl Sun Yat Sen Univ, Dept Mat & Optoelect Sci, Kaohsiung 80424, Taiwan
[2] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 80424, Taiwan
[3] Tung Fang Design Inst, Dept Elect Engn & Comp Sci, Kaohsiung 82941, Taiwan
[4] Natl Kaohsiung Normal Univ, Dept Chem, Kaohsiung 82446, Taiwan
[5] Natl Sun Yat Sen Univ, Dept Mech & Electromech Engn, Kaohsiung 80424, Taiwan
[6] Xiamen Univ, Dept Phys, Xiamen 361005, Fujian, Peoples R China
关键词
HOPPING CONDUCTION; HIGH-PERFORMANCE; OXIDE; HYDROGEN; RRAM; IMPROVEMENT; ORIGIN; RERAM;
D O I
10.1063/1.4902503
中图分类号
O59 [应用物理学];
学科分类号
摘要
This study presents the dual bipolar resistive switching characteristics induced by oxygen-ion accumulation. By introducing nitrogen to the interface between the resistive switching region and active switching electrode, filament-type and interface-type resistive switching behaviors can both exist under different operation conditions. This particular oxygen-ion accumulation-induced switching behavior suggests an extraordinary potential for resistive random access memory applications because the operating power can be significantly decreased (about 100 times). The physical mechanism of this oxygen-ion accumulation-induced interface-type resistive switching behavior is explained by our model and clarified by current conduction mechanism and material analysis. (C) 2014 AIP Publishing LLC.
引用
收藏
页数:4
相关论文
共 44 条
[1]   Dual Ion Effect of the Lithium Silicate Resistance Random Access Memory [J].
Chang, Kuan-Chang ;
Tsai, Tsung-Ming ;
Chang, Ting-Chang ;
Chen, Kai-Huang ;
Zhang, Rui ;
Wang, Zhi-Yang ;
Chen, Jung-Hui ;
Young, Tai-Fa ;
Chen, Min-Chen ;
Chu, Tian-Jian ;
Huang, Syuan-Yong ;
Syu, Yong-En ;
Bao, Ding-Hua ;
Sze, Simon M. .
IEEE ELECTRON DEVICE LETTERS, 2014, 35 (05) :530-532
[2]   Electrical conduction mechanism of Zn:SiOx resistance random access memory with supercritical CO2 fluid process [J].
Chang, Kuan-Chang ;
Tsai, Tsung-Ming ;
Zhang, Rui ;
Chang, Ting-Chang ;
Chen, Kai-Huang ;
Chen, Jung-Hui ;
Young, Tai-Fa ;
Lou, J. C. ;
Chu, Tian-Jian ;
Shih, Chih-Cheng ;
Pan, Jhih-Hong ;
Su, Yu-Ting ;
Syu, Yong-En ;
Tung, Cheng-Wei ;
Chen, Min-Chen ;
Wu, Jia-Jie ;
Hu, Ying ;
Sze, Simon M. .
APPLIED PHYSICS LETTERS, 2013, 103 (08)
[3]   Origin of Hopping Conduction in Graphene-Oxide-Doped Silicon Oxide Resistance Random Access Memory Devices [J].
Chang, Kuan-Chang ;
Zhang, Rui ;
Chang, Ting-Chang ;
Tsai, Tsung-Ming ;
Lou, J. C. ;
Chen, Jung-Hui ;
Young, Tai-Fa ;
Chen, Min-Chen ;
Yang, Ya-Liang ;
Pan, Yin-Chih ;
Chang, Geng-Wei ;
Chu, Tian-Jian ;
Shih, Chih-Cheng ;
Chen, Jian-Yu ;
Pan, Chih-Hung ;
Su, Yu-Ting ;
Syu, Yong-En ;
Tai, Ya-Hsiang ;
Sze, Simon M. .
IEEE ELECTRON DEVICE LETTERS, 2013, 34 (05) :677-679
[4]   Hopping Effect of Hydrogen-Doped Silicon Oxide Insert RRAM by Supercritical CO2 Fluid Treatment [J].
Chang, Kuan-Chang ;
Pan, Chih-Hung ;
Chang, Ting-Chang ;
Tsai, Tsung-Ming ;
Zhang, Rui ;
Lou, Jen-Chung ;
Young, Tai-Fa ;
Chen, Jung-Hui ;
Shih, Chih-Cheng ;
Chu, Tian-Jian ;
Chen, Jian-Yu ;
Su, Yu-Ting ;
Jiang, Jhao-Ping ;
Chen, Kai-Huang ;
Huang, Hui-Chun ;
Syu, Yong-En ;
Gan, Der-Shin ;
Sze, Simon M. .
IEEE ELECTRON DEVICE LETTERS, 2013, 34 (05) :617-619
[5]   Low Temperature Improvement Method on Zn:SiOx Resistive Random Access Memory Devices [J].
Chang, Kuan-Chang ;
Tsai, Tsung-Ming ;
Chang, Ting-Chang ;
Wu, Hsing-Hua ;
Chen, Kai-Huang ;
Chen, Jung-Hui ;
Young, Tai-Fa ;
Chu, Tian-Jian ;
Chen, Jian-Yu ;
Pan, Chih-Hung ;
Su, Yu-Ting ;
Syu, Yong-En ;
Tung, Cheng-Wei ;
Chang, Geng-Wei ;
Chen, Min-Chen ;
Huang, Hui-Chun ;
Tai, Ya-Hsiang ;
Gan, Der-Shin ;
Wu, Jia-Jie ;
Hu, Ying ;
Sze, Simon M. .
IEEE ELECTRON DEVICE LETTERS, 2013, 34 (04) :511-513
[6]   Characteristics and Mechanisms of Silicon-Oxide-Based Resistance Random Access Memory [J].
Chang, Kuan-Chang ;
Tsai, Tsung-Ming ;
Chang, Ting-Chang ;
Wu, Hsing-Hua ;
Chen, Jung-Hui ;
Syu, Yong-En ;
Chang, Geng-Wei ;
Chu, Tian-Jian ;
Liu, Guan-Ru ;
Su, Yu-Ting ;
Chen, Min-Chen ;
Pan, Jhih-Hong ;
Chen, Jian-Yu ;
Tung, Cheng-Wei ;
Huang, Hui-Chun ;
Tai, Ya-Hsiang ;
Gan, Der-Shin ;
Sze, Simon M. .
IEEE ELECTRON DEVICE LETTERS, 2013, 34 (03) :399-401
[7]   Developments in nanocrystal memory [J].
Chang, Ting-Chang ;
Jian, Fu-Yen ;
Chen, Shih-Cheng ;
Tsai, Yu-Ting .
MATERIALS TODAY, 2011, 14 (12) :608-615
[8]   Polarity of Bipolar Resistive Switching Characteristics in ZnO Memory Films [J].
Chang, Wen-Yuan ;
Peng, Ching-Shiang ;
Lin, Cheng-Hung ;
Tsai, Jui-Ming ;
Chiu, Fu-Chien ;
Chueh, Yu-Lun .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2011, 158 (09) :H872-H875
[9]   Resistance Switching Induced by Hydrogen and Oxygen in Diamond-Like Carbon Memristor [J].
Chen, Yi-Jiun ;
Chang, Kuan-Chang ;
Chang, Ting-Chang ;
Chen, Hsin-Lu ;
Young, Tai-Fa ;
Tsai, Tsung-Ming ;
Zhang, Rui ;
Chu, Tian-Jian ;
Ciou, Jian-Fa ;
Lou, Jen-Chung ;
Chen, Kai-Huang ;
Chen, Jung-Hui ;
Zheng, Jin-Cheng ;
Sze, Simon M. .
IEEE ELECTRON DEVICE LETTERS, 2014, 35 (10) :1016-1018
[10]   Tri-Resistive Switching Behavior of Hydrogen Induced Resistance Random Access Memory [J].
Chu, Tian-Jian ;
Tsai, Tsung-Ming ;
Chang, Ting-Chang ;
Chang, Kuan-Chang ;
Zhang, Rui ;
Chen, Kai-Huang ;
Chen, Jung-Hui ;
Young, Tai-Fa ;
Huang, Jen-Wei ;
Lou, Jen-Chung ;
Chen, Min-Chen ;
Huang, Syuan-Yong ;
Chen, Hsin-Lu ;
Syu, Yong-En ;
Bao, Dinghua ;
Sze, Simon M. .
IEEE ELECTRON DEVICE LETTERS, 2014, 35 (02) :217-219