Determination of young's modulus of polymer aggregate based on Hertz theory

被引：3
|
作者：
Ishikawa, A [1 ]
Tanji, T [1 ]
Kawai, A [1 ]
机构：
[1] Nagaoka Univ Technol, Dept Elect Engn, Nagaoka, Niigata 9402188, Japan
来源：
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY | 2004年 / 17卷 / 05期
关键词：
resist; polymer aggregate; Young's modulus; atomic force microscope; Hertz theory; separation force;
D O I：
10.2494/photopolymer.17.715
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
Elastic property of polymer aggregates in a resist pattern is characterized by using atomic force microscope (AFM). In order to determine Young's modulus of polymer aggregates based on Hertz theory, a separation force between polymer aggregates is measured by using the AFM. Young's modulus of polymer aggregates composing resist pattern can be determined to be 10-25MPa. The results of our experiment clearly show that the polymer aggregates indicates relatively low cohesion property.
引用
收藏
页码：715 / 718
页数：4
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