Micromoulding of three-dimensional photonic crystals on silicon substrates

被引：14

作者：

Ferrand, P

Minty, MJ

Egen, M

Ahopelto, J

Zentel, R

Romanov, SG

Torres, CMS

机构：

[1] Univ Gesamthsch Wuppertal, Inst Mat Sci, D-42097 Wuppertal, Germany

[2] Univ Gesamthsch Wuppertal, Dept Elect & Informat Engn, D-42097 Wuppertal, Germany

[3] Univ Mainz, Dept Chem & Pharm, Inst Organ Chem, D-55099 Mainz, Germany

[4] VTT Ctr Microelect, FIN-02044 Espoo, Finland

来源：

NANOTECHNOLOGY | 2003年 / 14卷 / 02期

关键词：

D O I：

10.1088/0957-4484/14/2/343

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The growth of three-dimensional photonic crystals (PhCs) on patterned silicon substrates is reported. It is shown that deep trenches can be uniformly filled by a self-assembly of polymer microspheres, in a close-packed face-centred cubic lattice. The crystalline quality is compared for different channel widths. These observations are confirmed by optical reflectance measurements in the visible range, showing a bandwidth of enhanced reflection. The possibility to detach the PhC, i.e. to use the substrate as a mould, is also demonstrated. The potential of this approach for building PhC-based complex architectures is discussed.

引用

页码：323 / 326

页数：4

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