Synthesis, crystal structure and mass transport properties of novel thallium ion precursors for MOCVD applications

被引:4
作者
Malandrino, G
Borzì, AM
Castelli, F
Fragalà, IL
Dastrù, W
Gobetto, R
Rossi, P
Dapporto, P
机构
[1] Univ Catania, Dipartimento Sci Chim, INSTM UdR Catania, I-95125 Catania, Italy
[2] Univ Turin, Dipartimento Chim Inorgan Chim Fis & Chim Mat, I-10125 Turin, Italy
[3] Univ Florence, Dipartimento Energet, I-50139 Florence, Italy
关键词
D O I
10.1039/b207470b
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
The reaction of Tl2CO3 with 1, 1, 1, 5,5,5-hexafluoro-2,4-pentanedione (Hhfa) and diglyme {CH3O(CH2CH2O)(2)CH3} or tetraglyme {CH3O(CH2CH2O)(4)CH3} in dichloromethane yields the anhydrous, thermally and air stable, volatile Tl(hfa).diglyme and Tl(hfa).tetraglyme adducts. They have been characterized by single crystal X-ray diffraction, elemental analysis, H-1 and C-13 NMR, IR and mass spectroscopy. Thermal and mass-transport properties have been investigated using thermogravimetric and differential scanning calorimetric measurements. There is evidence that both precursors are very low melting and volatile, and can be used as liquid Tl sources. Both adducts have been successfully applied to metal-organic chemical vapor deposition of thallium containing films.
引用
收藏
页码:369 / 374
页数:6
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