Surface hydrophobicity of an organosilicon film modified by a silver seed layer with the nanoparticle structures

被引:0
|
作者
Xu, Zheng-Wen [1 ]
Zhang, Yu-Kai [1 ]
Chen, Tai-Hong [2 ]
Chang, Jin-How [2 ]
Lee, Tsung-Hsin [3 ]
Li, Pei-Yu [1 ]
Liu, Day-Shan [1 ]
机构
[1] Natl Formosa Univ, Inst Electroopt & Mat Sci, Huwei Township, Yunlin, Taiwan
[2] Ind Technol Res Inst, Addit Mfg & Laser Applicat, Tainan, Taiwan
[3] Met Ind Res & Dev Ctr, Kaohsiung, Taiwan
关键词
silver seed layer; organosilicon film; hydrophobic surface; nanoparticle structures;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, a silver seed layer was deposited onto the silicon substrate prior to the deposition of the organosilicon film with the hydrophobic surface. Nanoparticle structures of the seed layer were formed after a post-annealing treatment. The surface morphology of the organosilicon film was well conformal to the silver seed layer with the nanoparticle structures. The resulting surface hydrophobicity evaluated from the water contact angle of the organosilicon film was markedly increased from 100 degrees to 122 degrees.
引用
收藏
页码:328 / 330
页数:3
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