Cutoff and band-pass interference filters for the UV region

被引:4
|
作者
Gainutdinov, IS [1 ]
Nikitin, AS [1 ]
Ivanov, VA [1 ]
Borisov, AN [1 ]
Nesmelov, EA [1 ]
机构
[1] Fed Sci Prod Ctr, State Inst Appl Opt, Kazan, Russia
关键词
Bandpass filters - Calculations - Optical design - Optical films - Optimization - Refractive index - Substrates - Thickness measurement - Ultraviolet radiation;
D O I
10.1364/JOT.69.000907
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This paper discusses questions of the practical fabrication of cutoff and band-pass interference filters for the 250-300-nm spectral region. The main attention is directed toward the method of monitoring the optical thicknesses of the layers. (C) 2002 Optical Society of America.
引用
收藏
页码:907 / 909
页数:3
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