Improved measurement method for electron energy distribution functions with high accuracy and reliability

被引：18

作者：

Bang, Jin Young ^{[1
]}

Kim, Aram ^{[1
]}

Chung, Chin Wook ^{[1
]}

机构：

[1] Hanyang Univ, Dept Elect Engn, Seoul 133791, South Korea

来源：

PHYSICS OF PLASMAS | 2010年 / 17卷 / 06期

关键词：

LANGMUIR PROBE; PLASMAS;

D O I：

10.1063/1.3432118

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

An improved ac superimposed method for measuring the electron energy distribution function (EEDF) with high accuracy is proposed. Although high amplitude of the superimposed ac voltage provides a higher signal-to-noise ratio (SNR), it causes the distortion in the EEDF. To correct the distortion, we used two different EEDFs measured by applying two different amplitudes. The distortion was accurately corrected over the entire electron energy region, and the corrected EEDF had the better SNR. The reliability of the corrected EEDF was proved by comparing the effective electron temperatures obtained from the measured EEDFs, and as a result, the corrected EEDF was very reliable. (C) 2010 American Institute of Physics. [doi:10.1063/1.3432118]

引用

页数：4

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