A two-axis water-immersible micro scanning mirror using hybrid polymer and elastomer hinges

被引：10

作者：

Duan, Xiaoyu ^{[1
]}

Li, Shuangliang ^{[1
]}

Medellin, Anthony ^{[2
]}

Ma, Chao ^{[2
]}

Zou, Jun ^{[1
]}

机构：

[1] Texas A&M Univ, Dept Elect & Comp Engn, College Stn, TX 77843 USA

[2] Texas A&M Univ, Dept Engn Technol & Ind Distribut, College Stn, TX 77843 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2020年 / 312卷

基金：

美国国家科学基金会;

关键词：

Hybrid hinges; Elastomer nanocomposite; Water-immersible scanning mirror; Photoacoustic and ultrasound microscopy;

D O I：

10.1016/j.sna.2020.112108

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a new two-axis water-immersible micro scanning mirror using hybrid polymer and elastomer hinges. The fast- and slow-axis hinges were made of stiff BoPET (biaxially-oriented polyethylene terephthalate) and soft elastomer nanocomposite (EN) loaded with alumina nanoparticles. Different concentrations of alumina nanoparticles in the base elastomer resin were tested to tune the elastic modulus of the elastomer nanocomposite. The testing results have shown a resonance frequency of 226Hz for the fast axis and no mechanical resonance for the slow axis when the scanning mirror was immersed in water. 2D B-scan and 3D volumetric ultrasound microscopy were demonstrated by using the hybrid hinge scanning mirror. The ability of scanning the slow axis at DC or very low frequencies allows a dense raster scanning pattern to be formed for improving both the imaging resolution and field of view. (C) 2020 Elsevier B.V. All rights reserved.

引用

页数：8

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